1. GaAs manufacturing processes conditions for micro- and nanoscale devices. (December 2020) Authors: Joint, F.; Abadie, C.; Vigneron, P.B.; Boulley, L.; Bayle, F.; Isac, N.; Cavanna, A.; Cambril, E.; Herth, E. Journal: Journal of manufacturing processes Issue: Volume 60(2020) Page Start: 666 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗