1. Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor. Issue 1 (January 2016) Authors: Lee, Jaewoo; Jeon, J.H.; Je, C.H.; Lee, S.Q.; Yang, W.S.; Lee, S.-G. Journal: IOP conference series Issue: Volume 108:Issue 1(2016) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗