1. Investigation on Different Damping Mechanisms on the Q Factor of MEMS Resonators. (2016) Authors: Jandak, M.; Neuzil, T.; Schneider, M.; Schmid, U. Journal: Procedia engineering Issue: Volume 168(2016) Page Start: 929 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗