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Author/Creator Indelicato, Valeria

1. Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics. (February 2016)

Authors:
Caccamo, Sebastiano; Puglisi, Rosaria A.; Di Franco, Salvatore; D'Urso, Luisa; Indelicato, Valeria; Italia, Markus; Pannitteri, Salvatore; La Magna, Antonino
Journal:
Materials science in semiconductor processing
Issue:
Volume 42:Part 2(2016:Feb.)
Page Start:
200
Record Type:
Journal Article
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