1. Comparative study on atomic layer deposition of HfO2via substitution of ligand structure with cyclopentadiene. Issue 4 (19th December 2019) Authors: Park, Sungmin; Park, Bo-Eun; Yoon, Hwi; Lee, Sanghun; Nam, Taewook; Cheon, Taehoon; Kim, Soo-Hyun; Cheon, Hwansung; Im, Sangkyun; Seong, Taegeun; Kim, Hyungjun Journal: Journal of materials chemistry Issue: Volume 8:Issue 4(2019) Page Start: 1344 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗