1. Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements. (January 2022) Authors: Morozov, N.F.; Indeitsev, D.A.; Igumnova, V.S.; Lukin, A.V.; Popov, I.A.; Shtukin, L.V. Journal: International journal of non-linear mechanics Issue: Volume 138(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗