1. Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe. Issue 8 (20th September 2013) Authors: Yamane, T.; Nakao, S.; Takeuchi, Y.; Muta, H.; Ichiki, R.; Uchino, K.; Kawai, Y. Journal: Contributions to plasma physics Issue: Volume 53:Issue 8(2013) Page Start: 588 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗