1. Novel Oxidants and Sources of Nitrogen for Atomic Layer Deposition. (4th May 2016) Authors: Alvarez, Daniel; Spiegelman, Jeffrey; Heinlein, Ed; Holmes, Russell; Ramos, Chris; Leo, Mark; Webb, Sean Journal: ECS transactions Issue: Volume 72:Number 4(2016) Page Start: 243 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Pulsed Electron Beams for Mitigating Damage in Next-generation Electronic Materials. (August 2020) Authors: VandenBussche, Elisah; Clark, Catherine; Holmes, Russell; Flannigan, David Journal: Microscopy and microanalysis Issue: Volume 26:(2020)Supplement 2 Page Start: 2866 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Ultra-High Purity Hydrazine Delivery for Low Temperature Metal Nitride ALD. (26th April 2017) Authors: Alvarez, Daniel; Spiegelman, Jeffrey; Holmes, Russell; Andachi, Keisuke; Raynor, Mark; Shimizu, Hank Journal: ECS transactions Issue: Volume 77:Number 5(2017) Page Start: 219 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗