1. Defect Mitigation in Area‐Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns. Issue 20 (25th August 2019) Authors: Soethoudt, Job; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Briggs, Basoene; Chan, Boon Teik; Delabie, Annelies Journal: Advanced materials interfaces Issue: Volume 6:Issue 20(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗