1. Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function. (11th May 2021) Authors: Dai, Gaoliang; Hu, Xiukun; Hering, Julian; Eifler, Matthias; Seewig, Jörg; von Freymann, Georg Journal: JPhys photonics Issue: Volume 3:Number 3(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗