1. Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition. (31st March 2015) Authors: Teramoto, Akinobu; Nakao, Yukihisa; Suwa, Tomoyuki; Hashimoto, Keiichi; Motoya, Tsukasa; Hirayama, Masaki; Sugawa, Shigetoshi; Ohmi, Tadahiro Journal: ECS transactions Issue: Volume 66:Number 4(2015) Page Start: 151 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction. (18th July 2019) Authors: Park, Hyeonwoo; Teramoto, Akinobu; Tsuchimoto, Jun-Ichi; Hayashi, Marie; Hashimoto, Keiichi; Sugawa, Shigetoshi Journal: Japanese journal of applied physics Issue: Volume 58:Number SI(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Influence of silicon wafer surface roughness on semiconductor device characteristics. (26th May 2020) Authors: Mori, Keiichiro; Samata, Shuichi; Mitsugi, Noritomo; Teramoto, Akinobu; Kuroda, Rihito; Suwa, Tomoyuki; Hashimoto, Keiichi; Sugawa, Shigetoshi Journal: Japanese journal of applied physics Issue: Volume 59:Number SM(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Introduction of a High Selectivity Etching Process with Advanced SiNx Etch Gas in the Fabrication of FinFET Structures. (4th May 2016) Authors: Kojiri, Takashi; Suwa, Tomoyuki; Hashimoto, Keiichi; Teramoto, Akinobu; Kuroda, Rihito; Sugawa, Shigetoshi Journal: ECS transactions Issue: Volume 72:Number 4(2016) Page Start: 23 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study. (14th March 2016) Authors: Furukawa, Kiichi; Teramoto, Akinobu; Kuroda, Rihito; Suwa, Tomoyuki; Hashimoto, Keiichi; Kojiri, Takashi; Sugawa, Shigetoshi Journal: Japanese journal of applied physics Issue: Volume 55:Number 4(2016:Apr.)Supplement 4 Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗