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Author/Creator Gidley, David W.

1. Carbon‐Enriched Amorphous Hydrogenated Boron Carbide Films for Very‐Low‐k Interlayer Dielectrics. (21st September 2017)

Authors:
Nordell, Bradley J.; Nguyen, Thuong D.; Caruso, Anthony N.; Purohit, Sudhaunshu S.; Oyler, Nathan A.; Lanford, William A.; Gidley, David W.; Gaskins, John T.; Hopkins, Patrick E.; Henry, Patrick; King, Sean W.; Paquette, Michelle M.
Journal:
Advanced Electronic Materials
Issue:
Volume 3:Number 12(2017)
Page Start:
n/a
Record Type:
Journal Article
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