1. Analysis of the composition of tantalum nitride in CMOS metallization trenches using parallel angle‐resolved XPS. (4th October 2020) Authors: Wehring, Bettina; Gerlich, Lukas; Kia, Alireza M.; Wislicenus, Marcus; Uhlig, Benjamin Other Names: Oswald Steffen guestEditor.; Watts John F. guestEditor.; Abel Marie‐Laure guestEditor. Journal: Surface and interface analysis Issue: Volume 52:Number 12(2020) Page Start: 962 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Doping Effects in CMOS‐compatible CoSi Thin Films for Thermoelectric and Sensor Applications. Issue 14 (10th June 2020) Authors: Krishna Nichenametla, Charan; Calvo, Jesus; Riedel, Stefan; Gerlich, Lukas; Hindenberg, Meike; Novikov, Sergej; Burkov, Alexander; Kozelj, Primož; Cardoso‐Gil, Raul; Wagner‐Reetz, Maik Journal: Zeitschrift für anorganische und allgemeine Chemie Issue: Volume 646:Issue 14(2020) Page Start: 1231 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗