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You searched for: Author/Creator Fujiyoshi, Motohiro- Fujiyoshi, Motohiro [remove] 3
- 621.38105 2
- Microelectromechanical systems -- Periodicals 2
- Micromechanics -- Periodicals 2
- 3‐axis force detection -- integrated tactile sensor -- moment detection -- shearing force -- tactile sensor network 1
- 621.30952 1
- Electrical engineering -- Periodicals 1
- MEMS -- resonant frequency -- perforated beam -- analytical design 1
- micro-electromechanical system (MEMS) -- silicon-on-insulator (SOI) -- residual stress deformation -- accelerometer 1