1. Fracture Analysis of a-SiC:H Membranes after Thermal Annealing. (2016) Authors: Frischmuth, T.; Klein, A.; Schneider, M.; Grille, T.; Schmid, U. Journal: Procedia engineering Issue: Volume 168(2016) Page Start: 1164 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗