1. Acoustic Characterization of Patterning Degradation during Wet Etching. (11th September 2015) Authors: Virgilio, Christophe; Garnier, Philippe; Foucaud, Mathieu; Devos, Arnaud; Pinceau, David; Carlier, Julien; Campistron, Pierre; Nongaillard, Bertrand; Neyens, Marc; Broussous, Lucile Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 185 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗