1. Combined analysis methods for investigating titanium and nickel surface contamination after plasma deep etching. (11th November 2021) Authors: Ettouri, Rim; Tillocher, Thomas; Lefaucheux, Philippe; Boutaud, Bertrand; Fernandez, Vincent; Fairley, Neal; Cardinaud, Christophe; Girard, Aurélie; Dussart, Rémi Journal: Surface and interface analysis Issue: Volume 54:Number 2(2022) Page Start: 134 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗