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You searched for: Author/Creator Engelmann, Sebastian U- Engelmann, Sebastian U [remove] 2
- 530 1
- 530.44 1
- Physics -- Periodicals 1
- Plasma (Ionized gases) -- Periodicals 1
- atomic and molecular data -- chemistries -- plasma models -- low temperature plasmas 1
- plasma etching -- gas pulsing -- directed self assembly -- atomic layer etch -- selective deposition -- block copolymer -- reactive ion etch 1