1. Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. (1st April 2016) Authors: Zhang, Liping; de Marneffe, Jean-François; Leroy, Floriane; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; Yatsuda, Koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhail R Journal: Journal of physics Issue: Volume 49:Number 17(2016) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗