1. Fabrication of 3-stepped spiral trench with smooth sidewall at nano-level to deposit superconducting material for energy storage. (23rd May 2019) Authors: Sasaki, Minoru; Hsu, Che-Wei; Suzuki, Yasuhiro; Hioki, Tatsumi; Noh, Joo-hyong; Takai, Osamu; Watanabe, Hideo; Doy, Hideyuki; Motohiro, Tomoyoshi Journal: International journal of nanotechnology Issue: Volume 15:Number 11/12(2018) Page Start: 858 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗