1. Machine learning enhanced in situ electron beam lithography of photonic nanostructures. Issue 39 (26th September 2022) Authors: Donges, Jan; Schlischka, Marvin; Shih, Ching-Wen; Pengerla, Monica; Limame, Imad; Schall, Johannes; Bremer, Lucas; Rodt, Sven; Reitzenstein, Stephan Journal: Nanoscale Issue: Volume 14:Issue 39(2022) Page Start: 14529 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗