1. Optimization of Ion Implantation processes for 4H-SiC DIMOSFET. Issue 55 (18th May 2016) Authors: Piluso, N.; Fontana, E.; Di Stefano, M.A.; Litrico, G.; Privitera, S.; Russo, A.; Lorenti, S.; Coffa, S.; La Via, F. Journal: MRS advances Issue: Volume 1:Issue 55(2016) Page Start: 3673 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗