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You searched for: Author/Creator Depla, D- Depla, D [remove] 4
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- Physics -- Periodicals 4
- compound sputtering yield -- aluminum oxide -- reactive sputtering -- discharge current -- time-resolved study 1
- rare earth oxide solid solutions -- reactive sputter deposition -- thin film growth -- surface adatom mobility -- phase instability 1
- simulations -- reactive magnetron sputtering -- spacecharge effect -- target erosion 1
- sputtering -- reactive gas -- modelling 1