1. Preface: The European Materials Research Society (EMRS) Fall Meeting 2021 Symposium P was held on 20–23 September 2021 in Warsaw, Poland. (1st November 2022) Authors: Demchenko, Iraida; Melikhov, Yevgen; Pellegrin, Eric Journal: Materials science in semiconductor processing Issue: Volume 150(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗