1. Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization. Issue 1 (1st January 2019) Authors: Kelly, J.; Kamineni, V.; Lin, X.; Pacquette, A.; Hopstaken, M.; Liang, Y.; Amanapu, H.; Peethala, B.; Jiang, L.; Demarest, J.; Shobha, H.; Raymond, M.; Haran, B. Journal: Journal of the Electrochemical Society Issue: Volume 166:Issue 1(2019) Page Start: D3100 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization. Issue 1 (9th November 2018) Authors: Kelly, J.; Kamineni, V.; Lin, X.; Pacquette, A.; Hopstaken, M.; Liang, Y.; Amanapu, H.; Peethala, B.; Jiang, L.; Demarest, J.; Shobha, H.; Raymond, M.; Haran, B. Journal: Journal of the Electrochemical Society Issue: Volume 166:Issue 1(2019) Page Start: D3100 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗