1. Indentation modulus and hardness investigation of crystalline silicon surfaces treated by inductively coupled plasma reactive ion etching. (September 2019) Authors: Puranto, Prabowo; Hamdana, Gerry; Pohlenz, Frank; Langfahl-Klabes, Jannick; Daul, Lars; Li, Zhi; Wasisto, Hutomo Suryo; Peiner, Erwin; Brand, Uwe Journal: Journal of physics Issue: Volume 1319(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Non-contact, automated adjustment procedure for capacitive displacement sensors. (2nd November 2021) Authors: Daul, Lars; Tao, Jin; Busch, Ingo; Koenders, Ludger; Meeß, Rudolf; Wolff, Helmut Journal: Measurement science & technology Issue: Volume 33:Number 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗