1. Alarm Activations Analysis for Performance Enhancement in a Semiconductor Facility. Issue 6 (2022) Authors: Al-kharaz, Mohammed; Ananou, Bouchra; Ouladsine, Mustapha; Combal, Michel; Pinaton, Jacques Journal: IFAC-PapersOnLine Issue: Volume 55:Issue 6(2022) Page Start: 439 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗