Author/Creator: Choi, Han-Eol - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Choi, Han-Eol

1. Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization. (22nd July 2020)

Authors:: Seo, Eun-Bin; Bae, Jae-Young; Kim, Sung-In; Choi, Han-Eol; Kim, Pilsu; Lee, Jong-Chan; Son, Young-Hye; Yun, Sang-Su; Park, Jin-Hyung; Park, Jea-Gun
Journal:: ECS journal of solid state science and technology
Issue:: Volume 9:Number 6(2020)
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Record Type:: Journal Article
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2. Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization. (18th May 2020)

Authors:: Seo, Eun-Bin; Bae, Jae-Young; Kim, Sung-In; Choi, Han-Eol; Son, Young-Hye; Yun, Sang-Su; Park, Jin-Hyung; Park, Jea-Gun
Journal:: ECS journal of solid state science and technology
Issue:: Volume 9:Number 5(2020)
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Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗