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You searched for: Author/Creator Cheng, Y.X.Limit your search
- Cheng, Y.X. [remove] 1
- 621.381 1
- Electronics -- Periodicals 1
- MEMS‐based piezoelectric BAW resonator -- out‐of‐plane degenerate mode -- microangular detector -- microelectromechanical piezoelectric concentrated‐mass bulk acoustic wave resonator -- PZT resonator -- driving efficiency enhancement -- sensing efficiency enhancement -- resonant frequency -- signal quality -- sensor resolution -- device fabrication -- device assembly -- impedance analyser -- quality factor -- PZT 1
- PZT 1
- acoustic resonators -- angular measurement -- bulk acoustic wave devices -- crystal resonators -- microassembling -- microsensors -- Q‐factor -- microfabrication 1