1. Deposition processing and surface metrology of MoNx thin films by design of experiment and single variable (nitrogen flow rate) methods. (1st March 2023) Authors: Chen, Fong-Zhi; Ting, I-Sheng; Kang, Wei-Zen; Lin, Yu-Wei; Huang, Jia-Hong Journal: Surface topography Issue: Volume 11:Number 1(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗