1. Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach. (19th July 2018) Authors: Zotovich, A; Rezvanov, A; Chanson, R; Zhang, L; Hacker, N; Kurchikov, K; Klimin, S; Zyryanov, S M; Lopaev, D; Gornev, E; Clemente, I; Miakonkikh, A; Maslakov, K Journal: Journal of physics Issue: Volume 51:Number 32(2018) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗