1. Performance of a reactive magnetron sputtering ion source using water vapor plasma. Issue 1 (1st April 2022) Authors: Catapang, Allen Vincent; James Edward Hernandez, II; Vasquez, Magdaleno R.; Wada, Motoi Journal: Journal of physics Issue: Volume 2244:Issue 1(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗