1. Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition. (27th March 2015) Authors: Hutchinson, B J; Teodorescu, V S; Negrea, R; Sheehan, B; Carolan, P; O'Brien, S; Modreanu, M; Pemble, M E; Povey, I. M Journal: ECS transactions Issue: Volume 66:Number 5(2015) Page Start: 269 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗