1. Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O2 plasmas. (15th October 2020) Authors: Meyer, T; LeDain, G; Girard, A; Rhallabi, A; Bouška, M; Němec, P; Nazabal, V; Cardinaud, C Journal: Plasma sources science & technology Issue: Volume 29:Number 10(2020:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O2 plasmas. (15th October 2020) Authors: Meyer, T; LeDain, G; Girard, A; Rhallabi, A; Bouška, M; Němec, P; Nazabal, V; Cardinaud, C Journal: Plasma sources science & technology Issue: Volume 29:Number 10(2020:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗