1. Co Liner Impact on Microstructure of Cu Interconnects. (1st January 2015) Authors: Zhang, Xunyuan; Cao, Linjun; Ryan, Vivian; Ho, Paul S.; Taylor, Bill; Witt, Christian; Labelle, Cathy Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3177 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Co Liner Impact on Microstructure of Cu Interconnects. (4th December 2014) Authors: Zhang, Xunyuan; Cao, Linjun; Ryan, Vivian; Ho, Paul S.; Taylor, Bill; Witt, Christian; Labelle, Cathy Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3177 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗