1. On three different ways to quantify the degree of ionization in sputtering magnetrons. (15th October 2018) Authors: Butler, Alexandre; Brenning, Nils; Raadu, Michael A; Gudmundsson, Jon Tomas; Minea, Tiberiu; Lundin, Daniel Journal: Plasma sources science & technology Issue: Volume 27:Number 10(2018:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗