1. ToF‐SIMS spectra multivariate analyses for the chemical characterization of microelectronic low‐k materials. (7th May 2014) Authors: Scarazzini, R.; Lépinay, M.; Broussous, L.; Barnes, J. P.; Veillerot, M.; Jousseaume, V.; Lee, Yeonhee; Moon, DaeWon; Kang, Hee Jae; Kim, Kyung Joong; Lee, Tae Geol; Lee, Jae Cheol; Yi, Keewook; Hong, Tae Eun Journal: Surface and interface analysis Issue: Volume 46:Number 1(2014:Jan.) Page Start: 213 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗