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You searched for: Author/Creator Bouville, David- Bouville, David [remove] 3
- 530.41 1
- 530.44 1
- 621.36505 1
- Electronic journals 1
- Photonics -- Periodicals 1
- Plasma (Ionized gases) -- Periodicals 1
- Solid state physics -- Periodicals 1
- Solids -- Industrial applications -- Periodicals 1
- germanium -- integrated optics -- mid-IR photonics -- photodetection -- silicon photonics 1
- high aspect ratio -- inductive-coupled plasma-deep reactive ion etching -- micropillars -- nanopillars -- plasma etching -- selectivity 1