1. Evaporation factor in productivity increase of hot target magnetron sputtering systems. (October 2016) Authors: Bleykher, G.A.; Borduleva, A.O.; Krivobokov, V.P.; Sidelev, D.V. Journal: Vacuum Issue: Volume 132(2016) Page Start: 62 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Evaporation factor in productivity increase of hot target magnetron sputtering systems. (October 2016) Authors: Bleykher, G.A.; Borduleva, A.O.; Krivobokov, V.P.; Sidelev, D.V. Journal: Vacuum Issue: Volume 132(2016) Page Start: 62 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗