1. Ultrashort pulse laser dicing of thin Si wafers: the influence of laser-induced periodic surface structures on the backside breaking strength. (29th September 2016) Authors: Domke, Matthias; Egle, Bernadette; Piredda, Giovanni; Stroj, Sandra; Fasching, Gernot; Bodea, Marius; Schwarz, Elisabeth Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 11(2016:Nov.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗