Author/Creator: Blue, Jakey - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Blue, Jakey

1. A physics-informed Run-to-Run control framework for semiconductor manufacturing. (1st October 2020)

Authors:: Yang, Wei-Ting; Blue, Jakey; Roussy, Agnès; Pinaton, Jacques; Reis, Marco S.
Journal:: Expert systems with applications
Issue:: Volume 155(2020)
Page Start:
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing. Issue 6 (18th February 2021)

Authors:: Rostami, Hamideh; Blue, Jakey; Chen, Argon; Yugma, Claude
Journal:: International journal of intelligent systems
Issue:: Volume 36:Issue 6(2021)
Page Start:: 2618
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

3. Impact of integrating equipment health in production scheduling for semiconductor fabrication. (June 2018)

Authors:: Kao, Yu-Ting; Dauzère-Pérès, Stéphane; Blue, Jakey; Chang, Shi-Chung
Journal:: Computers & industrial engineering
Issue:: Volume 120(2018)
Page Start:: 450
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗