1. 300 mm SiGe-On-Insulator Substrates with High Ge Content (70%) Fabricated Using the Smart Cut™ Technology. (18th August 2016) Authors: Widiez, Julie; Veytizou, Christelle; Hartmann, Jean-Michel; Loup, Virginie; Besson, Pascal; Baumel, Nicolas; Figuet, Christophe; Huyet, Isabelle; Mazen, Frédéric; Schwarzenbach, Walter; Tempesta, Catherine; Ecarnot, Ludovic Journal: ECS transactions Issue: Volume 75:Number 8(2016) Page Start: 79 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗