1. Characterization of inductively coupled plasma generated by a quadruple antenna. (17th January 2017) Authors: Shafir, G; Zolotukhin, D; Godyak, V; Shlapakovski, A; Gleizer, S; Slutsker, Ya; Gad, R; Bernshtam, V; Ralchenko, Yu; Krasik, Ya E Journal: Plasma sources science & technology Issue: Volume 26:Number 2(2017:Apr.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗