1. Back plate electroplating for high aspect ratio processes. Issue 2 (2nd May 2017) Authors: Marasso, Simone Luigi; Benetto, Simone; Para, Isabella; Ottone, Chiara; Mombello, Domenico; Perrone, Denis; Ferrero, Sergio; Scaltrito, Luciano; Pugliese, Diego; Cocuzza, Matteo; Pirri, Fabrizio Candido Journal: Microelectronics international Issue: Volume 34:Issue 2(2017) Page Start: 69 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗