1. Simulation of capacitive pressure sensor based on microelectromechanical systems technology. (May 2018) Authors: Baghelani, Masoud; Hosseini-Sianaki, Ahmad; Behzadi, Zeinab; Mirabdolah Lavasani, Arash Journal: Proceedings of the Institution of Mechanical Engineers Issue: Volume 232:Number 9(2018) Page Start: 1538 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗