1. Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust lines. (May 2020) Authors: Nguyen, Thanh-Trung; Lin, Yu-Jhen; Chin, Mo-Geng; Wang, Cheng-Chieh; Tsai, Hsiao-Yun; Chen, Jenq-Renn; Ngai, Eugene Y.; Chacon, Jennyfer; Franzi, Albert; Fifield, Christian; Baylor, Jason; Marci, John; Bitner, Justin; Prettyman, Kevin M.; Ferrera, Nicholas; Jordon, William; Szekeres, Trevor Journal: Journal of loss prevention in the process industries Issue: Volume 65(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗