1. A monolithically integrated torsional CMOS-MEMS relay. (5th October 2016) Authors: Riverola, M; Sobreviela, G; Torres, F; Uranga, A; Barniol, N Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 11(2016:Nov.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗