1. Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical- Mechanical-Planarization. (22nd July 2020) Authors: Seo, Eun-Bin; Bae, Jae-Young; Kim, Sung-In; Choi, Han-Eol; Kim, Pilsu; Lee, Jong-Chan; Son, Young-Hye; Yun, Sang-Su; Park, Jin-Hyung; Park, Jea-Gun Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 6(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization. (18th May 2020) Authors: Seo, Eun-Bin; Bae, Jae-Young; Kim, Sung-In; Choi, Han-Eol; Son, Young-Hye; Yun, Sang-Su; Park, Jin-Hyung; Park, Jea-Gun Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 5(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Surface-Tensile-Stress Induced Polishing-Voids Suppression via H2O2 Oxidizer Effect in Cross-Point Phase-Change-Memory-Cells. (1st January 2019) Authors: Kim, Soo-Bum; Cui, Hao; Cho, Jong-Young; Seo, Eun-Bin; Yun, Sang-Su; Son, Young-Hye; Jeong, Gi-Ppeum; Bae, Jae-Young; Park, Jin-Hyung; Kang, Sung-Goon; Park, Jea-Gun Journal: ECS journal of solid state science and technology Issue: Volume 8:Number 11(2019) Page Start: P667 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Surface-Tensile-Stress Induced Polishing-Voids Suppression via H2O2 Oxidizer Effect in Cross-Point Phase-Change-Memory-Cells. (23rd October 2019) Authors: Kim, Soo-Bum; Cui, Hao; Cho, Jong-Young; Seo, Eun-Bin; Yun, Sang-Su; Son, Young-Hye; Jeong, Gi-Ppeum; Bae, Jae-Young; Park, Jin-Hyung; Kang, Sung-Goon; Park, Jea-Gun Journal: ECS journal of solid state science and technology Issue: Volume 8:Number 11(2019) Page Start: P667 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗