1. In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes. (18th October 2016) Authors: Oh, Changho; Streller, Frank; Ashurst, W Robert; Carpick, Robert W; de Boer, Maarten P Journal: Journal of micromechanics and microengineering Issue: Volume 26:Number 11(2016:Nov.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗