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Author/Creator Arakawa, Masamoto

1. A calculation method of deposition profiles in chemical vapor deposition reactors using bio‐inspired algorithms. Issue 7 (7th May 2015)

Authors:
Takahashi, Takahiro; Inagaki, Taeka; Nariai, Shingo; Kodama, Junichi; Arakawa, Masamoto; Ema, Yoshinori; Hoffmann, Patrik; Knez, Mato; Vahlas, Constantin; Alexandrov, Sergei
Journal:
Physica status solidi
Issue:
Volume 12:Issue 7(2015:Jul.)
Page Start:
908
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

2. A calculation method of deposition profiles in chemical vapor deposition reactors using bio‐inspired algorithms. Issue 7 (7th May 2015)

Authors:
Takahashi, Takahiro; Inagaki, Taeka; Nariai, Shingo; Kodama, Junichi; Arakawa, Masamoto; Ema, Yoshinori; Hoffmann, Patrik; Knez, Mato; Vahlas, Constantin; Alexandrov, Sergei
Journal:
Physica status solidi
Issue:
Volume 12:Issue 7(2015:Jul.)
Page Start:
908
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

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